A Miniaturized Cmos Microelectrode Array System for Single Droplet Electrochemistry Applications
نویسندگان
چکیده
This paper presents an individually addressable 32x32 microelectrode array (MEA) system with built-in CMOS potentiostat for analyzing single droplets and ultra-small volume samples. The proposed system has advantages of smaller sample requirement, higher density, small form factor, low power and higher sensitivity and advanced functionality over the conventional electrode array. Each electrode is a square of side 7um with a center-to-center distance of 37um. The MEA integrated with potentiostat is robustly realized by employing electroless/electrochemical Au plating of native metal layers of CMOS process through a series of simple, maskless, clean-room free die-level post processing.
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